Pressure range at 20°C1) | Blank aluminum | 1 × 10E-8 mbar to 1.2 bar (abs) 1 × 10E-6 mbar to 1.2 bar (abs) |
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Hard anodized aluminum | |||
Leak rate to outside at 20°C1) | Valve body : | Blank aluminum | 1 × 10E-9 mbar l/s |
Hard anodized aluminum | 1 × 10E-5 mbar l/s | ||
Valve Seat : | Blank aluminum | 1 × 10E-9 mbar l/s | |
Hard anodized aluminum | 1 × 10E-4 mbar l/s | ||
Cycles until first service1) | Pressure control | 1 million | |
Closing / opening | 200,000 (unheated and under clean conditions) | ||
Admissible operating temperature2) | Valve body | ≤120°C | |
Controller | max. 50°C (≤ 35°C recommended) | ||
Mounting position | DN100 ~ 250 | Any3) | |
DN320 ~ 500 | horizontal only3) | ||
Material | Valve body, plate | 6061-T6 | |
Sealing ring | 6061-T6 | ||
Other parts | SUS 316L | ||
Seal (Bonnet, plate, body, feedthought) | FKM(Viton®) | ||
Feedthrough | Actuator | rotary feedthrough | |
Sealing ring | shaft feedthrough |
1) Unheated on delivery.
2) Maximum values : depending on operating conditions and sealing materials.
3) Valve seat on chamber side recommended.
Power input 1) | +24 VDC (±10%) @ 0.5V pk-pk max.[connector: POWER] | |
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Power Consumtion | 60 W max. (operation of valve with max. load) without PFO 4) | |
Sensor power supply 2) | +24 VDC (±10%) / 36 W max. [connector : POWER] ±15 VDC (±5%) / 1A max. [connector : SENSOR] |
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Input Output |
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Sensor input | 0-10 VDC 100 kΩ 0.23 mV 10 ms |
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Signal input Input resistance ADC resolution Sampling time |
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Digital inputs 3) | ±24 VDC max. | |
Digital outputss 3) | 70 VDC or 70 V peak max. 0.5 ADC or 0.5 A peak max. 10 W max. |
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Input voltage Input current Breaking capacity |
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Ambient temperature | +50 °C max. (<35 °C recommended) | |
Pressure control accuracy | 0.1% of sensor full scale | |
Position resolution / position control capability | 13,000 steps (full stroke) | |
time throttling only | closing | 1.1 ~ 1.5 s (full stroke) |
opening | 1.1 ~ 1.5 s (full stroke) |
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) Refer to chapter «Schematics» for details.
4) PFO = Power Failure Option. Refer to «3.4 Behaviour in case of power failure» for details.