| Pressure range at 20°C1) | Blank aluminum | 1 × 10E-8 mbar to 1.2 bar (abs) 1 × 10E-6 mbar to 1.2 bar (abs) |
|
|---|---|---|---|
| Hard anodized aluminum | |||
| Leak rate to outside at 20°C1) | Valve body : | Blank aluminum | 1 × 10E-9 mbar l/s |
| Hard anodized aluminum | 1 × 10E-5 mbar l/s | ||
| Valve Seat : | Blank aluminum | 1 × 10E-9 mbar l/s | |
| Hard anodized aluminum | 1 × 10E-4 mbar l/s | ||
| Cycles until first service1) | Pressure control | 1 million | |
| Closing / opening | 200,000 (unheated and under clean conditions) | ||
| Admissible operating temperature2) | Valve body | ≤120°C | |
| Controller | max. 50°C (≤ 35°C recommended) | ||
| Mounting position | DN100 ~ 250 | Any3) | |
| DN320 ~ 500 | horizontal only3) | ||
| Material | Valve body, plate | 6061-T6 | |
| Sealing ring | 6061-T6 | ||
| Other parts | SUS 316L | ||
| Seal (Bonnet, plate, body, feedthought) | FKM(Viton®) | ||
| Feedthrough | Actuator | rotary feedthrough | |
| Sealing ring | shaft feedthrough | ||
1) Unheated on delivery.
2) Maximum values : depending on operating conditions and sealing materials.
3) Valve seat on chamber side recommended.
| Power input 1) | +24 VDC (±10%) @ 0.5V pk-pk max 40 W max(exception sensor power) with optional SPS : +65W max(Sensor power dependent) with optional PFO4) : +5W max |
|
|---|---|---|
| Sensor power supply 2) | +24 VDC / 2.7A max [Power connector] ±15 VDC / 1.0A max [Sensor connector] |
|
| Input Output |
Actuator type | Stepper motor (NEMA 23) |
| Sensor inpiut | 0 ~ +10VDC 100KΩ |
|
| Signal input Input resistance |
||
| ADC resolution Sampling time |
24bit 1ms |
|
| Compressed air supply | 4 ~ 7 bar / 55 ~ 100 psi(above ATM) | |
| Ambient temperature | +50 °C max. (<35 °C recommended) | |
| Pressure control accuracy | 0.1% of sensor full scale | |
| DN100 | DN160 | DN200 | DN250 | DN320 | DN350 | |||||||
| Position resolution | 11,464 | 14,000 | 15,506 | 15,584 | 16,750 | 16,750 | ||||||
| Closing time throttling only | 0.7s | 0.8s | 0.9s | 0.9s | 1.8s | 1.8s | ||||||
| Opening time throttling only | 0.7s | 0.8s | 0.9s | 0.9s | 1.8s | 1.8s | ||||||
| Opening time throttling & isolation | 3s | 3s | 3s | 3s | 5s | 5s | ||||||
| Closing time throttling & isolation | 4s | 4s | 4s | 4s | 6s | 6s | ||||||
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) Refer to chapter «Schematics» for details.
4) PFO = Power Failure Option. Refer to «3.4 Behaviour in case of power failure» for details.