| Pressure range at 20°C1) | Blank aluminum | 1 × 10E-8 mbar to 1.2 bar (abs) 1 × 10E-6 mbar to 1.2 bar (abs) |
|
|---|---|---|---|
| Hard anodized aluminum | |||
| Leak rate to outside at 20°C1) | Valve body : | Blank aluminum | 1 × 10E-9 mbar l/s |
| Hard anodized aluminum | 1 × 10E-5 mbar l/s | ||
| Valve Seat : | Blank aluminum | 1 × 10E-9 mbar l/s | |
| Hard anodized aluminum | 1 × 10E-4 mbar l/s | ||
| Cycles until first service1) | Pressure control | 1 million | |
| Closing / opening | 200,000 (unheated and under clean conditions) | ||
| Admissible operating temperature2) | Valve body | ≤120°C | |
| Controller | max. 50°C (≤ 35°C recommended) | ||
| Mounting position | DN100 ~ 250 | Any3) | |
| DN320 ~ 500 | horizontal only3) | ||
| Material | Valve body, plate | 6061-T6 | |
| Sealing ring | 6061-T6 | ||
| Other parts | SUS 316L | ||
| Seal (Bonnet, plate, body, feedthought) | FKM(Viton®) | ||
| Feedthrough | Actuator | rotary feedthrough | |
| Sealing ring | shaft feedthrough | ||
1) Unheated on delivery.
2) Maximum values : depending on operating conditions and sealing materials.
3) Valve seat on chamber side recommended.
| Power input 1) | +24 VDC (±10%) @ 0.5V pk-pk max.[connector: POWER] | |
|---|---|---|
| Power Consumtion | 60 W max. (operation of valve with max. load) without PFO 4) | |
| Sensor power supply 2) | +24 VDC (±10%) / 36 W max. [connector : POWER] ±15 VDC (±5%) / 1A max. [connector : SENSOR] |
|
| Input Output |
||
| Sensor input | 0-10 VDC 100 kΩ 0.23 mV 10 ms |
|
| Signal input Input resistance ADC resolution Sampling time |
||
| Digital inputs 3) | ±24 VDC max. | |
| Digital outputss 3) | 70 VDC or 70 V peak max. 0.5 ADC or 0.5 A peak max. 10 W max. |
|
| Input voltage Input current Breaking capacity |
||
| Ambient temperature | +50 °C max. (<35 °C recommended) | |
| Pressure control accuracy | 0.1% of sensor full scale | |
| Position resolution / position control capability | 13,000 steps (full stroke) | |
| time throttling only | closing | 1.1 ~ 1.5 s (full stroke) |
| opening | 1.1 ~ 1.5 s (full stroke) | |
1) Internal overcurrent protection by a PTC device.
2) Refer to chapter «Sensor supply concepts» for details.
3) Refer to chapter «Schematics» for details.
4) PFO = Power Failure Option. Refer to «3.4 Behaviour in case of power failure» for details.